Semiconductor makers redefine motion control

Gyorki, John R.
January 1996
Machine Design;1/11/96, Vol. 68 Issue 1, p64
Trade Publication
Reports on the use of motion control devices in the semiconductor manufacturing equipment. Positioning controls that can hold tolerances on accuracy and repeatability within one nanometer; Technological innovations in positioning control devices; Design of piezoelectric positioning elements. INSETS: Machine vision systems look good.;Robots on track.;Untitled (capacitive sensor)..


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