A two-inch dc/rf circular magnetron sputtering gun for a miniature chamber for an in situ experiment

Gi-Hong Rue; Rue, Gi-Hong; Hyung-Kook Kim; Kim, Hyung-Kook
April 1998
Review of Scientific Instruments;Apr98, Vol. 69 Issue 4, p1616
Academic Journal
Examines the fabrication of a circular magnetron sputtering gun for an in situ reflectivity experiment. Features of the gun; Control of sputtering parameters; Performance of the manufactured gun.


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