TITLE

A two-inch dc/rf circular magnetron sputtering gun for a miniature chamber for an in situ experiment

AUTHOR(S)
Gi-Hong Rue; Rue, Gi-Hong; Hyung-Kook Kim; Kim, Hyung-Kook
PUB. DATE
April 1998
SOURCE
Review of Scientific Instruments;Apr98, Vol. 69 Issue 4, p1616
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication of a circular magnetron sputtering gun for an in situ reflectivity experiment. Features of the gun; Control of sputtering parameters; Performance of the manufactured gun.
ACCESSION #
835665

 

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