TITLE

Excimer laser etching of polymers

AUTHOR(S)
Srinivasan, V.; Smrtic, Mark A.; Babu, S. V.
PUB. DATE
June 1986
SOURCE
Journal of Applied Physics;6/1/1986, Vol. 59 Issue 11, p3861
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the excimer laser etching of polymers. Factor attributed to the process of ablation; Mechanisms which contribute to the ablation of Kapton or polyimide; Discussion on excimer laser lithography.
ACCESSION #
7651445

 

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