TITLE

Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

AUTHOR(S)
Sasaki, Akira; Nishihara, Katsunobu; Sunahara, Atsushi; Furukawa, Hiroyuki; Nishikawa, Takeshi; Koike, Fumihiro
PUB. DATE
December 2010
SOURCE
Applied Physics Letters;12/6/2010, Vol. 97 Issue 23, p231501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The emission spectrum and conversion efficiency of laser-produced terbium plasmas are theoretically investigated on the basis of computational atomic data. The theoretically calculated spectrum reproduces the main peak of observed spectrum at λ=6.5 nm, which originates from 4d-4f transitions of near palladiumlike ions (Tb19+). A simple model of the isothermal expansion of terbium plasma suggests that efficient emission can be achieved by pumping the plasma with a laser pulse at an intensity of approximately one order of magnitude greater than that used with tin sources at λ=13.5 nm.
ACCESSION #
55743069

 

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