TITLE

Soluble cyclopolymers based on 1,1,2,3,3-pentafluoro-4-(1,1,1,3,3,3-hexafluoro-2-hydroxy-2-propyl)-1,6-heptadiene: Synthesis and chemical transformations

AUTHOR(S)
Vainer, A. Ya.; Dyumaev, K. M.; Eremina, L. A.; Zelikson, K. I.; Pinchuk, E. M.; Shturman, M. N.
PUB. DATE
November 2010
SOURCE
Doklady Chemistry;Nov2010, Vol. 435 Issue 1, p275
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The article presents a study in which a method for the design and synthesis of polymers for nano-lithography technology is proposed. The polymers used are adequate to the technology with radiation exposure at 193 nanometer (nm) and are also suitable for electronic chips with 65 nm design rules. Thermal transformations in the matrices of thus synthesized polymers are also studied.
ACCESSION #
55457992

 

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