TITLE

Classical interatomic potential model for Si/H/Br systems and its application to atomistic Si etching simulation by HBr+

AUTHOR(S)
Nagaoka, T.; Eriguchi, K.; Ono, K.; Ohta, H.
PUB. DATE
January 2009
SOURCE
Journal of Applied Physics;Jan2009, Vol. 105 Issue 2, pN.PAG
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
An interatomic potential model for Si/H/Br systems has been developed for performing classical molecular dynamics simulations of Si etching processes by HBr plasmas. The potential form used here is the improved Stillinger–Weber potential function involving a correction term in order to predict the reaction dynamics more accurately. Parameters were determined based on ab initio data obtained from previous works on Si/Br systems by [Ohta et al. J. Appl. Phys. 104, 073302 (2008)]. By using this model, we performed Si etching simulations by monoenergetic HBr+ and Br+ beams. H atom has about 1% of the translational energy of cluster ions due to the small H/Br mass ratio (=1.0/79.9); therefore, H atoms in HBr+ behave like H radicals. This results in higher etch yields by HBr+ than those by Br+ in the low-energy region (less than 100 eV). This can be attributed to the chemical enhancement induced by the formation of Si–H bonds. On the other hand, yields by HBr+ and Br+ were almost the same in the high-energy region (more than 100 eV), where physical sputtering was relatively dominant and the contribution of H was small.
ACCESSION #
36339486

 

Related Articles

  • Time resolved magneto-optical studies of ferromagnetic InMnSb films. Frazier, M.; Kini, R. N.; Nontapot, K.; Khodaparast, G. A.; Wojtowicz, T.; Liu, X.; Furdyna, J. K. // Applied Physics Letters;2/11/2008, Vol. 92 Issue 6, p061911 

    We report time resolved magneto-optical measurements in InMnSb ferromagnetic films with 2% and 2.8% Mn contents grown by low temperature molecular beam epitaxy. In order to probe a possible interaction between the spins of photoexcited carriers and the Mn ions, we measured spin dynamics before...

  • Molecular Dynamics Simulations of “The Cooperativity Blockage Effect” in Alkali Metasilicate. Habasaki, J.; Ngai, K.L.; Hiwatari, Y. // AIP Conference Proceedings;2004, Vol. 708 Issue 1, p775 

    Molecular dynamics simulations were carried out at 700 K in single alkali and mixed alkali metasilicate glasses to reproduce the dramatic mixed alkali effect occurring in the dilute foreign alkali region. Both small numbers of frozen ions and another kind of alkali appears to immobilize a large...

  • ADSORPTION REACTION OF POLAR ORGANIC MOLECULES ON ${\rm Si}^+_n$ CLUSTER IONS. Nakagawara, Wakana; Tsunoyama, Hironori; Furuya, Ari; Misaizu, Fuminori; Ohno, Koichi // International Journal of Modern Physics B: Condensed Matter Phys;7/10/2005, Vol. 19 Issue 15-17, p2502 

    We have examined chemical reactions of small silicon cluster ions ${\rm Si}^+_n$ for n = 7 - 16 with polar organic molecules M (M = CH3CN, CD3OD, C2H5CN, and C2H5OH). The intensities of the adsorption products ${\rm Si}_n {\rm M}^+_m$ for m = 1 and 2 were investigated as a function of n. We...

  • Giant magnetostriction in Sm1-xNdxFe1.93 compounds. Hari Babu, V.; Markandeyulu, G.; Subrahmanyam, A. // Applied Physics Letters;6/18/2007, Vol. 90 Issue 25, p252513 

    The polycrystalline Sm1-xNdxFe1.93 (x=0, 0.08, 0.12, 0.16, 0.2, 0.24, 0.32, and 0.36) compounds are found to stabilize in MgCu2-type C15 cubic Laves phase structure. The compound x=0.12 is found to exhibit giant magnetostriction value of -1572×10-6 due to the anisotropy compensation between...

  • Acceptor, compensation, and mobility profiles in multiple Al implanted 4H-SiC. Giannazzo, F.; Roccaforte, F.; Raineri, V. // Applied Physics Letters;11/12/2007, Vol. 91 Issue 20, p202104 

    In this letter, we studied the effect of the annealing temperature (from 1400 to 1650 °C) on the acceptor, compensation, and mobility depth profiles in 4H-SiC implanted with multiple energy (40–550 keV) and medium dose (1×1013 cm-2) Al ions. Scanning capacitance microscopy and...

  • Study of thermal stability and luminescence quenching properties of bismuth-doped silicate glasses for fiber laser applications. Truong, V. G.; Bigot, L.; Lerouge, A.; Douay, M.; Razdobreev, I. // Applied Physics Letters;1/28/2008, Vol. 92 Issue 4, p041908 

    In the present work, we report on the luminescence properties of bismuth-doped silicate preforms and fibers under the influence of high temperature annealing and hydrogen-loading then annealing processes. Bismuth-related luminescence is found to be very sensitive to thermal annealing processes...

  • Ba8Ga16Sn30 with type-I clathrate structure: Drastic suppression of heat conduction. Avila, M. A.; Suekuni, K.; Umeo, K.; Fukuoka, H.; Yamanaka, S.; Takabatake, T. // Applied Physics Letters;1/28/2008, Vol. 92 Issue 4, p041901 

    For the past decade, intermetallic clathrates have been rattling their way into mainstream research in thermoelectrics. The unusual vibrations of their guest ions inside oversized cages interfere with the cage phonons while leaving the electronic flow intact, providing an exotic way to achieve a...

  • Relativistic Quantum Chemistry of Heavy Ions and Hadronic Atomic Systems: Spectra and Energy Shifts. Glushkov, A. V.; Khetselius, O.; Gurnitskaya, E.; Loboda, A.; Sukharev, D. // AIP Conference Proceedings;3/9/2009, Vol. 1102 Issue 1, p168 

    The levels energies and energy shifts are calculated for superheavy Li-like ions and some kaonic atoms on the basis of the gauge-invariant QED perturbation theory (PT) with an account of nuclear, exchange-correlation and radiative effects.

  • Measurement of isotope ratio of Ca+ ions in a linear Paul Trap. Hashimoto, Y.; Minamino, K.; Nagamoto, D.; Hasegawa, S. // AIP Conference Proceedings;3/17/2009, Vol. 1104 Issue 1, p36 

    Measurement of isotope ratios of Calcium is very useful in many fields. So we demonstrated the measurement of isotope ratios of 40Ca+ (abundance 96.4%) to 44Ca+ (2.09%) ions in a linear Paul trap with several laser lights tuning to the isotope shifts. And we found that the experimental...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics