Acceptor, compensation, and mobility profiles in multiple Al implanted 4H-SiC

Giannazzo, F.; Roccaforte, F.; Raineri, V.
November 2007
Applied Physics Letters;11/12/2007, Vol. 91 Issue 20, p202104
Academic Journal
In this letter, we studied the effect of the annealing temperature (from 1400 to 1650 °C) on the acceptor, compensation, and mobility depth profiles in 4H-SiC implanted with multiple energy (40–550 keV) and medium dose (1×1013 cm-2) Al ions. Scanning capacitance microscopy and scanning spreading resistance microscopy were jointly used to determine those depth profiles with nanometric resolution. It was demonstrated that the electrical activation in the Al implanted layer at increasing annealing temperatures was the result of a counterbalance between the increase in the acceptor concentration and the decrease in the percentage compensation.


Related Articles

  • Lanthanum-stabilized europium-doped cubic barium chloride: An efficient x-ray phosphor. Edgar, A.; Zimmermann, J.; von Seggern, H.; Varoy, C. R. // Journal of Applied Physics;Apr2010, Vol. 107 Issue 8, p083516 

    We report the photoluminescence and x-ray luminescence of lanthanum-stabilized cubic barium chloride with europium (Eu2+) doping, of general composition Ba1-x-yEuyLaxCl2+x. X-ray diffraction patterns confirm that the material adopts a cubic fluorite structure for x=0.125 and 0

  • Voltage bias induced modification of the transport property of all oxide Pr0.5Ca0.5MnO3/SrTi0.95Nb0.05O3 junctions. Ghosh, Barnali; Das, K.; Raychaudhuri, A. K. // Journal of Applied Physics;Apr2011, Vol. 109 Issue 8, p083934 

    In this paper we report what happens to a virgin oxide junction Pr0.5Ca0.5MnO3/SrTi0.95Nb0.05O3 (PCMO/Nb:STO), when it is subjected to cycling of voltage bias of moderate value (±4 V). It is found that the initial cycling leads to formation of a permanent state of lower resistance where the...

  • Production of a microbeam of slow highly charged ions with a tapered glass capillary. Ikeda, Tokihiro; Kanai, Yasuyuki; Kojima, Takao M.; Iwai, Yoshio; Kambara, Tadashi; Yamazaki, Yasunori; Hoshino, Masamitsu; Nebiki, Takuya; Narusawa, Tadashi // Applied Physics Letters;10/16/2006, Vol. 89 Issue 16, p163502 

    The authors have developed a method to produce a microbeam of slow highly charged ions based on a self-organized charge-up inside a tapered glass capillary. A transmission of 8 keV Ar8+ beam through the capillary 5 cm long with 800/24 μm inlet/outlet inner diameters was observed stably for...

  • Effect of two-temperature trapped electrons to nonlinear dust-ion-acoustic solitons. Moslem, Waleed M.; El-Taibany, W. F. // Physics of Plasmas;Dec2005, Vol. 12 Issue 12, p122309 

    Propagation of three-dimensional dust-ion-acoustic solitons is investigated in a dusty plasma consisting of positive ions, negatively variable-charged dust particles, and two-temperature trapped electrons. We use the reductive perturbation theory to reduce the basic set of fluid equations to one...

  • TRANSFER IONIZATION IN COLLISIONS OF PARTIALLY STRIPPED Fq+ WITH HELIUM ATOMS. Xi-Meng Chen; De-Yang Yu; Zhaoyuan Liu; Zhengmin Liu; Zhihu Yang; Qiang Wang; Baowei Ding; Hongbin Fu // International Journal of Modern Physics B: Condensed Matter Phys;7/10/2005, Vol. 19 Issue 15-17, p2438 

    The cross-section ratios R of transfer ionization to single electron capture of Helium atom induced by fluorine ions in the strong-interaction region were measured by means of the position-sensitive-detection and the time-of-flight (TOF) technologies. The velocity and charge state dependence of...

  • PLASMON-ASSISTED VISIBLE LIGHT EMISSION IN THE INTERACTION OF HIGHLY CHARGED IONS WITH SURFACES. Zhao, Y. T.; Xiao, G. Q.; Zhang, X. A.; Yang, Z. H.; Zhan, W. L.; Li, F. L. // International Journal of Modern Physics B: Condensed Matter Phys;7/10/2005, Vol. 19 Issue 15-17, p2491 

    The measurements of spectra with wavelengths from 200nm to 1000nm emitted from solid surfaces excited by highly charged ions(HCIs) are reported. The results show that the spectral line of specimen materials can be excited by HCIs, and when the quantity of electric charge is more than a critical...

  • HEAVY-ION PHYSICS WITH THE ATLAS DETECTOR AT THE LHC – A PROGRESS TOWARDS OPERATION. DOLEJSI, J. // International Journal of Modern Physics E: Nuclear Physics;Aug2007 Part 1 of 1, Vol. 16 Issue 7/8, p2522 

    Building of ATLAS is progressing well towards recording first pp collisions at 0.9 TeV in 2007, pp at 14 TeV in 2008 and hopefully PbPb soon later. The complexity of the detector is illustrated and several observables interesting for heavy-ion physics are discussed.

  • Monitoring the Bragg peak location of 73 MeV/u carbon ions by means of prompt γ-ray measurements. Testa, E.; Bajard, M.; Chevallier, M.; Dauvergne, D.; Le Foulher, F.; Freud, N.; Létang, J.-M.; Poizat, J.-C.; Ray, C.; Testa, M. // Applied Physics Letters;9/1/2008, Vol. 93 Issue 9, p093506 

    By means of a time-of-flight technique, we measured the longitudinal profile of prompt γ-rays emitted by 73 MeV/u 13C ions irradiating a polymethyl methacrylate target. This technique allowed us to minimize the shielding against neutrons and scattered γ-rays, and to correlate prompt gamma...

  • Coupling MD Simulations and X-ray Absorption Spectroscopy to Study Ions in Solution. Marcos, E. Sánchez; Beret, E. C.; Martínez, J. M.; Pappalardo, R. R.; Ayala, R.; Muñoz-Páez, A. // AIP Conference Proceedings;12/26/2007, Vol. 963 Issue 2, p904 

    The structure of ionic solutions is a key-point in understanding physicochemical properties of electrolyte solutions. Among the reduced number of experimental techniques which can supply direct information on the ion environment, X-ray Absorption techniques (XAS) have gained importance during...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics