TITLE

Mapping the road to NIL

AUTHOR(S)
J. J. M.
PUB. DATE
June 2006
SOURCE
Solid State Technology;Jun2006, Vol. 49 Issue 6, p28
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
The article reports on the concluded three-year study which identifies key parameters determining the outcome of the nanoimprint lithography (NIL) process in the U.S. The research showed parameter that determine the process outcome specifically the key geometry factors that could be used to anticipate the polymer deformation mechanism. The study also developed a nanoimprint capillary number, a nondimensional measure that is helpful in predicting the mechanism that governs polymer flow details.
ACCESSION #
21332910

 

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