TITLE

Simulations with a dynamic reaction–diffusion model of the polymer grating preparation by patterned ultraviolet illumination

AUTHOR(S)
Leewis, Christian M.; de Jong, Arthur M.; van IJzendoorn, Leo J.; Broer, Dirk J.
PUB. DATE
June 2004
SOURCE
Journal of Applied Physics;6/15/2004, Vol. 95 Issue 12, p8352
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Simulations of volume fraction profiles formed during the lithographic preparation of polymer gratings are made with a reaction/diffusion model, based on the Flory–Huggins theory. Monomer migration is driven by a gradient in the chemical potential rather than a gradient in the concentration. If the chemical potential is used as the driving force, monomer migration is not only driven by a difference in concentration, or volume fraction, but also by other entropic effects: the differences in monomer length and the degree of crosslinking of a polymer network. The monomer volume fractions are simulated as a function of position for different ultraviolet intensities and various grating pitches. Profound edges of the monomer volume fractions caused by the fact that the reaction rate is high compared to the diffusion rate are both measured and simulated. An excellent agreement with nuclear microprobe measurements on the polymer gratings is obtained. © 2004 American Institute of Physics.
ACCESSION #
13307732

 

Related Articles

  • Soft molding lithography of conjugated polymers. Pisignano, Dario; Persano, Luana; Cingolani, Roberto; Gigli, Giuseppe; Babudri, Francesco; Farinola, Gianluca M.; Naso, Francesco // Applied Physics Letters;2/23/2004, Vol. 84 Issue 8, p1365 

    We report on the nanopatterning of conjugated polymers by soft molding, and exploit the glass transition of the organic compound in conformal contact with an elastomeric element. We succeeded in printing different compounds with resolution down to 300 nm at temperatures up to 300 °C in...

  • Lithographically induced self-construction of polymer microstructures for resistless patterning. Chou, Stephen Y.; Zhuang, Lei // Applied Physics Letters;8/16/1999, Vol. 75 Issue 7, p1004 

    Develops a method that can directly pattern polymer microstructures of arbitrary shapes without using a resist, exposure, chemical development, and etching. Attraction of the polymer to the mask protrusions; Significance of the distance between the mask and the substrate; Benefits and potential...

  • Bottom-up soft-lithographic fabrication of three-dimensional multilayer polymer integrated optical microdevices. Huang, Yanyi; Paloczi, George T.; Poon, Joyce K. S.; Yariv, Amnon // Applied Physics Letters;10/11/2004, Vol. 85 Issue 15, p3005 

    We develop a method to efficiently fabricate three-dimensional multilayer polymer microchips for integrated optical applications. This method uses soft lithography to mold the core structures on top of the cladding layers. By repeating the process, a three-dimensional multilayer integrated...

  • Adaptive bonding technique for precise assembly of three-dimensional microstructures. Park, Sang-Hu; Jeong, Jun-Ho; Choi, Dae-Geun; Kim, Ki-Don; Altun, Ali Ozhan; Lee, Eung-Sug; Yang, Dong-Yol; Lee, Kwang-Sup // Applied Physics Letters;6/4/2007, Vol. 90 Issue 23, p233109 

    Precise fabrication of three-dimensional (3D) self-standing microstructures on thin glass plates via two-photon induced polymerization (TPP) has been an important issue for innovative 3D nanodevices and microdevices. However, there are still issues remaining to be solved, such as building 3D...

  • All-optical fabrication of three-dimensional photonic crystals in photopolymers by multiplex-exposure holographic recording. Orlic, Susanna; Müller, Christian; Schlösser, Alexander // Applied Physics Letters;9/26/2011, Vol. 99 Issue 13, p131105 

    We develop holographic recording techniques for the versatile fabrication of three-dimensional (3D) photonic crystals in photopolymers. We introduce multiplex exposure schemes to overcome the restrictions of four-beam holographic lithography. A three-step exposure process makes it possible to...

  • Comparison between dynamic plowing lithography and nanoindentation methods. Cappella, B.; Sturm, H. // Journal of Applied Physics;1/1/2002, Vol. 91 Issue 1, p506 

    Two different methods of nanolithography, namely dynamic plowing lithography (DPL) and indentation by means of force-displacement curves (FDI), have been compared by performing them on two different polymers, poly (methylmethacrylate) and polystyrene. No fundamental differences can be found out...

  • THERMOCHEMICAL PROCESS YIELDS NANOSCALE LITHOGRAPHY.  // EDN;10/11/2007, Vol. 52 Issue 21, p26 

    The article reports on the development of a fast, reliable environmentally flexible, commercially viable way of creating nanoscale structures by researchers at the Georgia Institute of Technology. The thermochemical nanolithography technique is said to employ the heated tip of an atomic-force...

  • New Copolymers of Dialkyl Fumarates with Norbornene Derivatives for Sub-0.2 �m Lithography at a Wavelength of 193 nm: Synthesis and Thermal and Photochemical Transformations. Vainer, A.; Dyumaev, K.; Eremina, L.; Tamarkina, R.; Ternovskii, E.; Shvartsburg, L. // Doklady Physical Chemistry;Sep2005, Vol. 404 Issue 1-3, p159 

    Proposes a strategy for the synthesis of copolymers with acid-labile side groups suitable for optical lithography. Use of optical lithography for obtaining nanosized structures; Analysis of the thermal transformations of the polymers; Means of determining the composition of the copolymer.

  • Crystal nucleation: In a tight corner. Sear, Richard P. // Nature Materials;Nov2011, Vol. 10 Issue 11, p809 

    The article discusses the nucleation of crystal with microscopic fluctuation which occurs at an interface of solid impurity. It mentions the article "Nature Materials," by Y. Diao and colleagues which reports that nanopores in polymer films promote the nucleation of aspirin crystals. It says...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics